Operational Methods in Semiconductor Manufacturing

This is a continuation of a collaborative research program, begun in 1997 between the Division of Design, Manufacture, and Industrial Innovation of the National Science Foundation (NSF), International SEMATECH (ISMT), and the Factory Sciences Program of the Semiconductor Research Corporation (SRC).  The purpose of the solicitation is to jointly support research activities directed at the development of innovative new operational methods that will enable factory performance to keep pace with ongoing technical advances in equipment and processes, increases in wafer sizes, and the increasing complexity of semiconductor supply chain. The major theme of this initiative is the development of modeling, analysis, and optimization techniques based on fundamental principles leading to models that allow for effective control of semiconductor manufacturing operations and supply chain.